The Tropel FlatMaster provides industry leading performance of surface form measurements for precision component manufacturers world wide. This non-contact optical technique records the entire surface in seconds! The Flat Master rapidly and accurately measures flatness, line profile, spherical radius and other surface parameters from a wide variety of surfaces.
Several standard versions of the Flat Master are available to optimize the accuracy over different component size ranges. Three basic sizes are available; 40, 100 and 200, to accommodate part sizes of 40 mm, 100 mm and 200 mm respectively. Industrial (pictured) and simi-conductor specific configurations are available. Customizing is available to achieve your specific performance requirements, whether it is for increasing dynamic range, accuracy, or to include component handling features.
Adding a Flat Master to your shop floor, or wafer clean room, can significantly improve your process, yield, and productivity using full form measurements with unprecedented speed, accuracy and throughput!
| Specifications: | |
| Accuracy | 50 nm (2.0 u") |
| Repeatability | 15 nm (0.6 u") 1 sigma |
| Resolution | 5 nm (0.2 u") |
| Dynamic Range | |
| FM 40 | > 50 um |
| FM 100 & FM 200 | > 100 um |
| Part Range (recommended) | FM 40 5 mm - 40 mm |
| FM 100 25 mm - 100 mm | (Contact us for smaller parts) |
| FM 200 25 mm - 200 mm | (Contact us for smaller parts) |
| Measured Data Points | ~ 230,000 per measurement |
| Measurement Time | 5 seconds (typical) |
| Measurement Datums | Least squares, minimum zone |
| Standard Measurement | Flatness, line profile, surface profile, spherical radius |
| Data Analysis | 3-D, topographic, yield, distribution, and many more! See TMS Software. |
| Materials | Metals, ceramics, polymers, glass, and others |
| Surfaces | Ground, lapped, honed, polished, superfinished, and others. |
| Reflectivity | Minimum of 10% at 85o Incidence angle |
| Maximum Roughness | 1.0 um (40 u") Ra (typical at 4 um / fringe) |
| Options: | |
| Extended Range (XR) | Allows measurements at greater dynamic Range |
| Extended Accuracy (XA) | Allows measurements at increased accuracy |
| Extended Range & Accuracy (XRA) | Includes both of the above |
